Sputtering from energetic self-ion cascades
نویسندگان
چکیده
منابع مشابه
Effect of surface morphology on the sputtering yields. I. Ion sputtering from self-affine surfaces
As extensive experimental studies have shown, under certain conditions, ion bombardment of solid targets induces a random (self-affine) morphology on the ion-eroded surfaces. The rough morphology development is known to cause substantial variations in the sputtering yields. In this article, we present a theoretical model describing the sputter yields from random, self-affine surfaces subject to...
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ژورنال
عنوان ژورنال: Journal of Nuclear Materials
سال: 1974
ISSN: 0022-3115
DOI: 10.1016/0022-3115(74)90249-9